Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6035113 | Electron beam proximity correction method for hierarchical design data | Samuel Jonas Wind | 2000-03-07 |
| 5051598 | Method for correcting proximity effects in electron beam lithography | Christopher J. Ashton, Dieter Kern, Walter W. Molzen, Jr., Stephen A. Rishton, Michael Rosenfield +1 more | 1991-09-24 |