Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10242843 | Apparatus for large area plasma processing | — | 2019-03-26 |
| 8974629 | High density plasma reactor | Eric Chevalier | 2015-03-10 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10242843 | Apparatus for large area plasma processing | — | 2019-03-26 |
| 8974629 | High density plasma reactor | Eric Chevalier | 2015-03-10 |