Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9624570 | Compact, filtered ion source | — | 2017-04-18 |
| 6756596 | Filtered ion source | — | 2004-06-29 |
| 6139964 | Plasma enhancement apparatus and method for physical vapor deposition | Bernard F. Coll | 2000-10-31 |
| 5458754 | Plasma enhancement apparatus and method for physical vapor deposition | Bernard F. Coll | 1995-10-17 |