Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461889 | Method of fabricating semiconductor device with diamond substrate | — | 2002-10-08 |
| 6090523 | Multi-resin material for an antireflection film to be formed on a workpiece disposed on a semiconductor substrate | Haruo Iwasaki, Atsushi Nishizawa, Tsuyoshi Yoshii, Hiroshi Yoshino | 2000-07-18 |
| 5583063 | Method of forming T-shaped, cross-sectional pattern using two layered masks | — | 1996-12-10 |
| 5498769 | Method for thermally treating resist film and forming undercut pattern | — | 1996-03-12 |