Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437404 | Sputtering apparatus | Tetsuya Endo | 2016-09-06 |
| 7785449 | Magnetron unit, magnetron sputtering apparatus, and method of manufacturing electronic device | Tetsuya Endo | 2010-08-31 |