Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699920 | Methods of manufacturing polishing substrates | — | 2004-03-02 |
| 6523210 | Surface charge controlling apparatus for wafer cleaning | — | 2003-02-25 |
| 6489394 | Charged ion cleaning devices and cleaning system | — | 2002-12-03 |
| 6033486 | Method for cleaning a surface by using a cationic sponge material | — | 2000-03-07 |
| 5844030 | Charged ion cleaning devices and cleaning system | — | 1998-12-01 |
| 5311634 | Sponge cleaning pad | — | 1994-05-17 |