Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5846375 | Area specific temperature control for electrode plates and chucks used in semiconductor processing equipment | Robin Lee Gilchrist | 1998-12-08 |
| 5656523 | Photoresist flow during the formation of a semiconductor device | — | 1997-08-12 |
| 5395781 | Method of making a semiconductor device using photoresist flow | — | 1995-03-07 |