Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8568597 | Process for purifying silicon source material by high gravity rotating packed beds | Shyang Su, Yi Su | 2013-10-29 | |
| 5286519 | Fluid dispersion head | — | 1994-02-15 | $5,301,000 |
| 5268034 | Fluid dispersion head for CVD appratus | — | 1993-12-07 | $7,896,000 |