MS

Miho Satou

UL Ulvac: 1 patents #339 of 680Top 50%
Overall (All Time): #2,674,663 of 4,157,543Top 65%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11421315 Sputtering target and method of producing sputtering target Xiaoli Lu, Junichi Nitta, Akira Nakamura 2022-08-23