Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7138336 | Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thin film using the same thereof | Chun Soo Lee, Hyung Sang Park | 2006-11-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7138336 | Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thin film using the same thereof | Chun Soo Lee, Hyung Sang Park | 2006-11-21 |