Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4693173 | Clean room | Atsushi Saiki, Michio Suzuki, Hideo Sunami, Shojiro Asai, Kinichiro Asami | 1987-09-15 |
| 4458703 | System for cleaning articles | Yosuke Inoue, Masahiro Wanami, Akira Kabashima | 1984-07-10 |
| 4276114 | Semiconductor substrate and a manufacturing method thereof | Yukio Takano, Masahiko Ogirima, Shigeru Aoki, Shigeo Kato | 1981-06-30 |