Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797640 | Method of utilizing hard mask for copper plasma etch | Peter Nunan | 2004-09-28 |
| 6752900 | Vacuum loadlock ultraviolet bake for plasma etch | — | 2004-06-22 |
| 6355979 | Hard mask for copper plasma etch | Peter Nunan | 2002-03-12 |
| 6339028 | Vacuum loadlock ultra violet bake for plasma etch | — | 2002-01-15 |
| 6077387 | Plasma emission detection for process control via fluorescent relay | — | 2000-06-20 |
| 6046483 | Planar isolation structure in an integrated circuit | Frank R. Bryant | 2000-04-04 |
| 5834360 | Method of forming an improved planar isolation structure in an integrated circuit | Frank R. Bryant | 1998-11-10 |