Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292567 | Microelectromechanical mirror device with compensation of planarity errors | Nicolo′ Boni, Roberto Carminati | 2025-05-06 |
| 12270990 | Microelectromechanical mirror device with piezoelectric actuation and improved opening angle | Nicolo' BONI, Roberto Carminati | 2025-04-08 |
| 12242051 | Microelectromechanical mirror device with piezoelectric actuation and piezoresistive sensing having self-calibration properties | Nicolo′ Boni, Gianluca Mendicino, Enri Duqi, Roberto Carminati | 2025-03-04 |
| 12222492 | Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes | Nicolo' BONI, Roberto Carminati | 2025-02-11 |
| 12117605 | Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereof | Domenico Giusti | 2024-10-15 |
| 12117608 | MEMS micromirror device enveloped in a package having a transparent surface and having a tiltable platform | Roberto Carminati, Nicolo' BONI, Enri Duqi | 2024-10-15 |
| 12084341 | MEMS device having an improved stress distribution and manufacturing process thereof | Nicolo' BONI, Lorenzo VINCIGUERRA, Roberto Carminati | 2024-09-10 |
| 12043540 | Micro-electro-mechanical device with a shock-protected tiltable structure | Nicolo' BONI, Roberto Carminati | 2024-07-23 |
| 11953813 | Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics | Nicolo' BONI, Roberto Carminati | 2024-04-09 |
| 11933966 | Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror | Roberto Carminati, Nicolo' BONI | 2024-03-19 |
| 11933968 | Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics | Nicolo' BONI, Roberto Carminati | 2024-03-19 |
| 11673799 | Method of processing a wafer for manufacturing an oscillating structure such as a micro-mirror | Enri Duqi, Nicolo′ Boni, Lorenzo Baldo, Roberto Carminati | 2023-06-13 |
| 11655140 | Micro-electro-mechanical device with a shock-protected tiltable structure | Nicolo' BONI, Roberto Carminati | 2023-05-23 |
| 11656539 | Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics | Nicolo′ Boni, Roberto Carminati | 2023-05-23 |
| 11520138 | Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics | Nicolo' BONI, Roberto Carminati | 2022-12-06 |
| 11448871 | Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation and having stiffening elements | Nicolo′ Boni, Roberto Carminati | 2022-09-20 |
| 11353694 | Microelectromechanical mirror device with piezoelectric actuation, having an improved structure | Nicolo' BONI, Roberto Carminati | 2022-06-07 |
| 11327295 | Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror | Roberto Carminati, Nicolo' BONI | 2022-05-10 |
| 11086122 | Microelectromechanical device having a structure tiltable through an actuation of the piezoelectric type | Roberto Carminati, Nicolo′ Boni | 2021-08-10 |
| 10365475 | Oscillating structure with piezoelectric actuation, system and manufacturing method | Roberto Carminati, Sebastiano Conti | 2019-07-30 |
| 10175474 | Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation | Domenico Giusti, Roberto Carminati | 2019-01-08 |
| 10048491 | MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type | Roberto Carminati, Marco Rossi | 2018-08-14 |