| 11033982 |
System isolation and optics bay sealing |
— |
2021-06-15 |
| 10118252 |
Methods and systems for laser processing continuously moving sheet material |
Yasu Osako, Mark A. Unrath |
2018-11-06 |
| 9983562 |
Adaptive part profile creation via independent side measurement with alignment features |
Joseph HASTY, Alexander A. Myachin |
2018-05-29 |
| 9029731 |
Methods and systems for laser processing continuously moving sheet material |
Yasu Osako, Mark A. Unrath |
2015-05-12 |
| 8899887 |
Drilling apparatus with a decoupled force frame and metrology frame for enhanced positioning |
Wojciech B. Kosmowski |
2014-12-02 |
| 8735774 |
Force reaction compensation system |
— |
2014-05-27 |
| 8461480 |
Orthogonal integrated cleaving device |
Mehmet E. Alpay |
2013-06-11 |
| 8461482 |
Pre-process stress loading components for post-process warp control |
Mehmet E. Alpay |
2013-06-11 |
| 8320424 |
Optical component cleanliness and debris management in laser micromachining applications |
Bryan Bolt, David Martin Hemenway, A. Grey Lerner, Brady Nilsen, Richard Pope |
2012-11-27 |
| 8207472 |
Debris capture and removal for laser micromachining |
— |
2012-06-26 |
| 8132966 |
Rotary flexure and air bearing support for rotary indexing system |
— |
2012-03-13 |
| 7886449 |
Flexure guide bearing for short stroke stage |
— |
2011-02-15 |
| 7889322 |
Specimen inspection stage implemented with processing stage coupling mechanism |
Robert A. Ferguson, Jeremy Willey |
2011-02-15 |
| 7760331 |
Decoupled, multiple stage positioning system |
Kelly J. Bruland |
2010-07-20 |
| 7638731 |
Real time target topography tracking during laser processing |
— |
2009-12-29 |
| 7603785 |
Air bearing assembly for guiding motion of optical components of a laser processing system |
— |
2009-10-20 |
| 7602562 |
Fluid counterbalance for a laser lens used to scribe an electronic component substrate |
— |
2009-10-13 |
| 7443179 |
Zero motion contact actuation |
— |
2008-10-28 |