Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4994141 | Method of manufacturing a mask support of SiC for radiation lithography masks | Holger Luthje, Bernd Matthiesen | 1991-02-19 |
| 4946751 | Method of manufacturing a mask for radiation lithography | Angelika Bruns, Waldemar Gotze, Holger Luthje | 1990-08-07 |
| 4941942 | Method of manufacturing a mask support of sic for x-ray lithography masks | Angelika Bruns, Holger Luthje, Bernd Matthiessen | 1990-07-17 |
| 4606803 | Method of manufacturing a mask for the production of patterns in lacquer layers by means of X-ray lithography | Holger Luthje, Angelika Bruns, Bernd Matthiessen | 1986-08-19 |
| 4555460 | Mask for the formation of patterns in lacquer layers by means of X-ray lithography and method of manufacturing same | Angelika Bruns, Holger Luthje, Bernd Matthiessen | 1985-11-26 |
| 4468799 | Radiation lithography mask and method of manufacturing same | Holger Luthje, Bernd Matthiessen | 1984-08-28 |
| 4386114 | Method of manufacturing a thin-film magnetic field sensor | Holger Luthje | 1983-05-31 |