Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421596 | Method and apparatus for processing surface of a semiconductor substrate | Mikko Soderlund, Pasi MERILÄINEN, Patrick Rabinzohn | 2025-09-23 |
| 10576445 | Apparatus and method for processing particulate matter | Risto Peltonen | 2020-03-03 |