Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12469676 | In-situ etch rate or deposition rate measurement system | Steffen Guertler, Raphaël Sperling | 2025-11-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12469676 | In-situ etch rate or deposition rate measurement system | Steffen Guertler, Raphaël Sperling | 2025-11-11 |