Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908024 | Apparatus and method for online and real-time detection of temperature of epitaxial wafer | Dong Yan, Chengmin Li, Linzi Wang, Jianpeng Liu | 2021-02-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908024 | Apparatus and method for online and real-time detection of temperature of epitaxial wafer | Dong Yan, Chengmin Li, Linzi Wang, Jianpeng Liu | 2021-02-02 |