Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7136168 | Interferometric topological metrology with pre-established reference scale | — | 2006-11-14 |
| 6999181 | Advanced signal processing technique for translating fringe line disturbances into sample height at a particular position above an interferometer's sample stage | — | 2006-02-14 |
| 4957367 | Inteferometric imaging system | — | 1990-09-18 |