Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11275319 | Lithography apparatus, determination method, and method of manufacturing an article | Kazumasa Tanaka | 2022-03-15 |
| 10859927 | Calculation method, exposure method, storage medium, exposure apparatus, and method of manufacturing article | — | 2020-12-08 |
| 10042266 | Determination method, exposure apparatus, storage medium, and method of manufacturing article | — | 2018-08-07 |