Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384943 | Ion generating apparatus and method of removing a fluorine compound deposited in a source housing thereof | — | 2016-07-05 |
| 7863922 | Evaluation method of insulating film and measurement circuit thereof | — | 2011-01-04 |
| 7738119 | Optical inspection system for a wafer | — | 2010-06-15 |
| 6563334 | Insulating film method and apparatus therefor | — | 2003-05-13 |
| 6544035 | Semiconductor manufacturing apparatus | — | 2003-04-08 |