Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6309525 | Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation | Masayasu Futagawa | 2001-10-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6309525 | Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation | Masayasu Futagawa | 2001-10-30 |