Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735432 | Method and apparatus for forming substrate surfaces with exposed crystal lattice using accelerated neutral atom beam | Sean R. Kirkpatrick, Thy Yam, Michael J. Walsh | 2023-08-22 |
| 10670960 | Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beams | Sean R. Kirkpatrick, Son T. Chau | 2020-06-02 |