Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117737 | Apparatus and method for cleaning a support structure in a lithographic system | — | 2024-10-15 |
| 11953838 | Lithography support cleaning with cleaning substrate having controlled geometry and composition | Akshay Dipakkumar Harlalka | 2024-04-09 |