Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11977326 | Pellicle for EUV lithography | Dennis De Graaf, Richard Beaudry, Maxime BIRON, Paul Janssen, Thijs KATER +6 more | 2024-05-07 |
| 10753816 | Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure | Pascal Newby, Cedric Spits, Luc Frechette | 2020-08-25 |
| 9036229 | MEMS device with independent rotation in two axes of rotation | Barrie Keyworth, Jared Crawford | 2015-05-19 |
| 8368983 | MEMS device with independent rotation in two axes of rotation | Barrie Keyworth, Jared Crawford | 2013-02-05 |
| 8208192 | MEMS device with independent rotation in two axes of rotation | Barrie Keyworth, Jared Crawford | 2012-06-26 |
| 6629820 | Microfluidic flow control device | — | 2003-10-07 |