KZ

Kaveh Zarkar

MI Mks Instruments: 12 patents #21 of 442Top 5%
📍 Andover, MA: #193 of 1,295 inventorsTop 15%
🗺 Massachusetts: #10,511 of 88,656 inventorsTop 15%
Overall (All Time): #416,590 of 4,157,543Top 15%
12
Patents All Time

Issued Patents All Time

Showing 1–12 of 12 patents

Patent #TitleCo-InventorsDate
9952078 Upstream volume mass flow verification systems and methods Junhua Ding 2018-04-24
8793082 Upstream volume mass flow verification systems and methods Junhua Ding 2014-07-29
7891228 Dual-mode mass flow verification and mass flow delivery system and method Junhua Ding 2011-02-22
7757554 High accuracy mass flow verifier with multiple inlets Junhua Ding 2010-07-20
7706925 Integrated pressure and flow ratio control system Junhua Ding, Michael L'Bassi, William R. Clark 2010-04-27
7673645 Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement Junhua Ding 2010-03-09
7621290 Gas delivery method and system including a flow ratio controller using antisymmetric optimal control Junhua Ding, John A. Smith 2009-11-24
7474968 Critical flow based mass flow verifier Junhua Ding, Ali Shajii, Daniel Smith 2009-01-06
7467027 Compensation for thermal siphoning in mass flow controllers Junhua Ding, Michael L'Bassi 2008-12-16
7461549 Mass flow verifiers capable of providing different volumes, and related methods Junhua Ding 2008-12-09
7296465 Vertical mount mass flow sensor Junhua Ding, Michael L'Bassi 2007-11-20
6955072 System and method for in-situ flow verification and calibration Michael L'Bassi, Mark J. Quaratiello 2005-10-18