Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8377829 | Method of manufacturing a capacitor deep trench and of etching a deep trench opening | Ta-Chuan Yeh, Ni-Min Chung, Yung-Chang Lin, Ruey-Chyr Lee, Chien-Kuo Wang | 2013-02-19 |
| 7435354 | Treatment method for surface of photoresist layer and method for forming patterned photoresist layer | — | 2008-10-14 |
| 7344954 | Method of manufacturing a capacitor deep trench and of etching a deep trench opening | Ta-Chuan Yeh, Ni-Min Chung, Yung-Chang Lin, Ruey-Chyr Lee, Chien-Kuo Wang | 2008-03-18 |
| 7309641 | Method for rounding bottom corners of trench and shallow trench isolation process | — | 2007-12-18 |
| 7226798 | Fabrication method for a multi-layered thin film protective layer | Wei-Shiau Chen | 2007-06-05 |
| 7214626 | Etching process for decreasing mask defect | — | 2007-05-08 |
| 6548318 | Fabrication method for a multi-layered thin film protective layer | Wei-Shiau Chen | 2003-04-15 |
| 6429921 | Structure of a multi-layered thin film protective layer | Wei-Shiau Chen | 2002-08-06 |