Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11998954 | Substrate processing apparatus and substrate processing method | Junya Minamida | 2024-06-04 |
| 7559699 | Optical coupling module | — | 2009-07-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11998954 | Substrate processing apparatus and substrate processing method | Junya Minamida | 2024-06-04 |
| 7559699 | Optical coupling module | — | 2009-07-14 |