| 7135407 |
Method of manufacturing a semiconductor device |
Hong-Mi Park, In-Sun Park, Hyeon-Deok Lee |
2006-11-14 |
| 7122468 |
Methods of fabricating integrated circuit conductive contact structures including grooves |
Hyeon-Deok Lee, Hong-Mi Park, In-Sun Park |
2006-10-17 |
| 6905960 |
Method of forming a contact in a semiconductor device |
Hong-Mi Park, Jong-Sik Chun, Hyeon-Deok Lee, In-Sun Park, Jong-Myeong Lee |
2005-06-14 |
| 6797575 |
Method for forming a polycide structure in a semiconductor device |
Young-Cheon Kim, In-Sun Park |
2004-09-28 |
| 6774029 |
Method for forming a conductive film and a conductive pattern of a semiconductor device |
Hyeon-Deok Lee, Hong-Mi Park, In-Sun Park |
2004-08-10 |
| 6670268 |
Metal interconnection with low resistance in a semiconductor device and a method of forming the same |
In-Sun Park |
2003-12-30 |
| 6623798 |
Chemical vapor deposition method for depositing silicide and apparatus for performing the same |
In-Sun Park, Young-Cheon Kim, Chul Whang-Bo, Hyeon-Deok Lee |
2003-09-23 |
