Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7214125 | Method for controlling pH during planarization and cleaning of microelectronic substrates | Kenneth F. Zacharias, Guy F. Hudson | 2007-05-08 |
| 6913523 | Method for controlling pH during planarization and cleaning of microelectronic substrates | Kenneth F. Zacharias, Guy F. Hudson | 2005-07-05 |
| 6716089 | Method for controlling pH during planarization and cleaning of microelectronic substrates | Kenneth F. Zacharias, Guy F. Hudson | 2004-04-06 |
| 6368194 | Apparatus for controlling PH during planarization and cleaning of microelectronic substrates | Kenneth F. Zacharias, Guy F. Hudson | 2002-04-09 |
| 6220934 | Method for controlling pH during planarization and cleaning of microelectronic substrates | Kenneth F. Zacharias, Guy F. Hudson | 2001-04-24 |