Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767427 | Apparatus and method for conditioning polishing pad in a chemical mechanical planarization process | Emil A. Kneer, Eric Cooper, Richard Grizzard | 2004-07-27 |
| 6265231 | Process control via valve position and rate of position change monitoring | — | 2001-07-24 |