Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6845145 | Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices | Robert A. Selzer, Franz Rauch, Heinz Siegert, Klaus Simon, William Rudolf Friml +1 more | 2005-01-18 |
| 6295332 | Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices | Robert A. Selzer, William Rudolf Friml, Robert H. Macklin, Franz Rauch, Heinz Siegert +1 more | 2001-09-25 |