Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6188050 | System and method for controlling process temperatures for a semi-conductor wafer | Charles E. Duffer | 2001-02-13 |
| 5894531 | Method and apparatus for detection of ultrasound using a fiber-optic interferometer | — | 1999-04-13 |