Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098406 | Substrate support unit and deposition apparatus including the same | Il Jun Jeon, Ji Ho Uh, Jun-Sung Lee, Ji Woon Im | 2021-08-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098406 | Substrate support unit and deposition apparatus including the same | Il Jun Jeon, Ji Ho Uh, Jun-Sung Lee, Ji Woon Im | 2021-08-24 |