JT

Jan C. Terry

VI Veeco Instruments: 1 patents #165 of 323Top 55%
Overall (All Time): #4,052,159 of 4,157,543Top 100%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
4385238 Reregistration system for a charged particle beam exposure system Eugene R. Westerberg, Donald R. Cone, Julius J. Muray 1983-05-24