Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8363377 | Electrostatic chuck and apparatus having the same | — | 2013-01-29 |
| 8245751 | Substrate bonding apparatus | — | 2012-08-21 |
| 8072573 | Apparatus and method for attaching substrates | Kyung Mi Kim | 2011-12-06 |
| 7980287 | Adhesive chuck and substrate bonding apparatus | — | 2011-07-19 |
| 7864289 | Apparatus and method for attaching substrates | Kyung Mi Kim | 2011-01-04 |
| 7765682 | Apparatus for attaching substrates | Dong Gun Kim | 2010-08-03 |
| 7640960 | Apparatus for attaching substrates | Dong Gun Kim | 2010-01-05 |