Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9304399 | Resist composition and method for producing semiconductor device | Nobuyuki Matsuzawa, Koji Arimitsu | 2016-04-05 |
| 8765353 | Resist composition and method for producing semiconductor device | Koji Arimitsu, Nobuyuki Matsuzawa | 2014-07-01 |
| 8697342 | Method of modifying chemically amplified resist pattern, modifier for chemically amplified resist pattern, and resist pattern structure | Ichiro Takemura, Eriko Matsui, Nobuyuki Matsuzawa | 2014-04-15 |