Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424465 | Valve structure and substrate processing apparatus including the same | Kangmin Park, Hyungho Kim, Dongwoo Wi, Jiho Uh | 2025-09-23 |
| 12360072 | PH monitoring systems having sensor modules | Sunhwan Park, Jaeo Ryu, Jungsoo Son, Kyoungok Kim, Wonhee Park +1 more | 2025-07-15 |
| 11948814 | Valve structure and substrate processing apparatus including the same | Kangmin Park, Hyungho Kim, Dongwoo Wi, Jiho Uh | 2024-04-02 |