Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4802968 | RF plasma processing apparatus | Howard A. Hendrix, Ernest S. Ward | 1989-02-07 |
| 4576698 | Plasma etch cleaning in low pressure chemical vapor deposition systems | James P. Gallagher | 1986-03-18 |