Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466503 | Method of manufacturing semiconductor device | — | 2016-10-11 |
| 8349087 | Semiconductor device manufacturing method, wafer treatment system, and recording medium | Nobuo Hironaga, Futoshi Ota, Toru Yokoyama, Osamu Sugawara, Ryo Satou +1 more | 2013-01-08 |
| 8021899 | Method of manufacturing a semiconductor device including optical test pattern above a light shielding film | — | 2011-09-20 |
| 7969584 | Measuring method including measuring angle of concave portion and irradiating light over concave portion | — | 2011-06-28 |
| 7800108 | Semiconductor device and method of manufacturing semiconductor device including optical test pattern above a light shielding film | — | 2010-09-21 |
| 7704877 | Method of manufacturing semiconductor device and control system | — | 2010-04-27 |
| 6136722 | Plasma etching method for forming hole in masked silicon dioxide | — | 2000-10-24 |
| 5988104 | Plasma treatment system | — | 1999-11-23 |