Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7369213 | Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same | Shinichiro Noudo, Kumiko Oguni, Hiroyuki Nakano | 2008-05-06 |
| 7160655 | Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same | Shinichiro Noudo, Kumiko Oguni, Hiroyuki Nakano | 2007-01-09 |
| 6969571 | Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same | Shinichiro Noudo, Kumiko Oguni, Hiroyuki Nakano | 2005-11-29 |