Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5324361 | Apparatus for coating cap-shaped substrates | Heinz-Werner Etzkorn, Günter Weidmann, Volker Paquet | 1994-06-28 |
| 5308650 | Process and apparatus for the ignition of CVD plasmas | Ewald Morsen, Volker Paquet, Helge Vogt, Gunther Weidmann | 1994-05-03 |
| 5300901 | Arrangement for coupling in of microwave energy | Ewald Morsen, Helge Vogt, Günter Weidmann | 1994-04-05 |
| 5236511 | Plasma CVD process for coating a dome-shaped substrate | Heinz-Werner Etzkorn, Volker Paquet, Günter Weidmann | 1993-08-17 |
| 5154943 | Plasma CVD process for coating a dome-shaped substrate | Heinz-Werner Etzkorn, Volker Paquet, Günter Weidmann | 1992-10-13 |