Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11888287 | Split liquid cooled heat exchanger with thermoelectric cooling controlled temperature | David Thompson, Gerard J. Pelletier | 2024-01-30 |
| 11121017 | Load port module | Daniel A. Hall, Matthew W. Coady, Marcello Trolio, Michael Spinazola | 2021-09-14 |
| 9310668 | Replaceable dome assembly | David J. Korwan, Bruce Baran, Gerard M. Perron, Edward M. Kolvek | 2016-04-12 |
| 9255595 | Optical dome bezel | Gerard A. Esposito, Sixing She | 2016-02-09 |
| 8821099 | Load port module | Daniel A. Hall, Matthew W. Coady, Marcello Trolio, Michael Spinazola | 2014-09-02 |
| 8182192 | Equipment storage for substrate processing apparatus | Daniel A. Hall, Christopher Hofmeister, William J. Fosnight, Jeff G. Araujo, Steven Allen | 2012-05-22 |
| 7762755 | Equipment storage for substrate processing apparatus | Daniel A. Hall, Christopher Hofmeister, William J. Fosnight, Jeff G. Araujo, Steven Allen | 2010-07-27 |
| 6409448 | Ergonomic load port | — | 2002-06-25 |
| 6364593 | Material transport system | Christopher Hofmeister | 2002-04-02 |
| 5761996 | Pivoting time recorder | Walter P. Gauthier | 1998-06-09 |
| 5764250 | Dual-line time recorder | Radu R. Tenenbaum | 1998-06-09 |
| 5008705 | Autofocus system for microlithography | — | 1991-04-16 |