Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7189333 | End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces | — | 2007-03-13 |
| 6852016 | End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces | — | 2005-02-08 |
| 6557608 | Method for attaching web based polishing materials together on a polishing tool | Aaron T. Bartlett | 2003-05-06 |
| 6478914 | Method for attaching web-based polishing materials together on a polishing tool | Aaron T. Bartlett | 2002-11-12 |
| 5736427 | Polishing pad contour indicator for mechanical or chemical-mechanical planarization | — | 1998-04-07 |
| 5679065 | Wafer carrier having carrier ring adapted for uniform chemical-mechanical planarization of semiconductor wafers | — | 1997-10-21 |