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Uniform cavitation for particle removal |
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2010-01-12 |
| 7181863 |
Wafer dryer and method for drying a wafer |
Jagjit Ratra |
2007-02-27 |
| 7078340 |
Metal deposit process |
— |
2006-07-18 |
| 7057973 |
Method and device for measuring cavitation |
— |
2006-06-06 |
| 6944097 |
Method and device for measuring cavitation |
— |
2005-09-13 |
| 6270584 |
Apparatus for drying and cleaning objects using controlled aerosols and gases |
Thomas D. Spencer, Rob E. Carter |
2001-08-07 |
| 6180524 |
Metal deposit process |
— |
2001-01-30 |
| 6119366 |
Chemical drying and cleaning method |
Robert Elson, John F. Schipper |
2000-09-19 |
| 6036785 |
Method for removing chemical residues from a surface |
— |
2000-03-14 |
| 5974689 |
Chemical drying and cleaning system |
Robert Elson, John F. Schipper |
1999-11-02 |
| 5968285 |
Methods for drying and cleaning of objects using aerosols and inert gases |
Thomas D. Spencer, Rob E. Carter |
1999-10-19 |
| 5964958 |
Methods for drying and cleaning objects using aerosols |
Thomas D. Spencer |
1999-10-12 |
| 5909741 |
Chemical bath apparatus |
— |
1999-06-08 |
| 5685086 |
Method and apparatus for drying objects using aerosols |
— |
1997-11-11 |
| 5653045 |
Method and apparatus for drying parts and microelectronic components using sonic created mist |
— |
1997-08-05 |
| 5505785 |
Method and apparatus for cleaning integrated circuit wafers |
— |
1996-04-09 |
| 4539052 |
Method for making a composite cathode active material/current collector product |
David N. Palmer |
1985-09-03 |
| 4416915 |
Method of making chalcogenide cathodes |
David N. Palmer |
1983-11-22 |