| 11117800 |
Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite |
Deborah J. Kirby, Raviv Perahia, Hung Nguyen, David T. Chang |
2021-09-14 |
| 10308505 |
Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite |
Deborah J. Kirby, Raviv Perahia, Hung Nguyen, David T. Chang |
2019-06-04 |
| 10141906 |
High Q quartz-based MEMS resonators and method of fabricating same |
David T. Chang, Hung Nguyen, Randall L. Kubena |
2018-11-27 |
| 9985198 |
High Q quartz-based MEMS resonators and methods of fabricating same |
David T. Chang, Hung Nguyen, Randall L. Kubena |
2018-05-29 |
| 8765615 |
Quartz-based MEMS resonators and methods of fabricating same |
David T. Chang, Hung Nguyen, Randall L. Kubena |
2014-07-01 |
| 7923689 |
Multi-band sub-wavelength IR detector having frequency selective slots and method of making the same |
Deborah J. Kirby, Terence J. De Lyon, David T. Chang, Daniel J. Gregoire, Jeffery J. Puschell |
2011-04-12 |
| 7851971 |
Low frequency quartz based MEMS resonators and method of fabricating the same |
David T. Chang, Randall L. Kubena, Pamela R. Patterson |
2010-12-14 |
| 7671431 |
Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects |
Randall L. Kubena, David T. Chang |
2010-03-02 |
| 7647688 |
Method of fabricating a low frequency quartz resonator |
David T. Chang, Randall L. Kubena, Pamela R. Patterson |
2010-01-19 |
| 7202100 |
Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope |
Randall L. Kubena, David T. Chang |
2007-04-10 |
| 7015060 |
Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects |
Randall L. Kubena, David T. Chang |
2006-03-21 |
| 5501822 |
Fabrication method for a 3-d opto-electronic system with laser inter-substrate communication |
Randy L. Kubena, Gary M. Atkinson, Hugh McNulty, Jr., James W. Ward |
1996-03-26 |
| 5335243 |
3-D opto-electronic system with laser inter-substrate communication, and fabrication method |
Randy L. Kubena, Gary M. Atkinson, Hugh McNulty, Jr., James W. Ward |
1994-08-02 |
