FR

Franz Rauch

Overall (All Time): #1,596,935 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6845145 Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices Robert A. Selzer, Heinz Siegert, Klaus Simon, William Rudolf Friml, Joe Baker Gagnon +1 more 2005-01-18
D451937 Vertical stepper stage apparatus Robert A. Selzer 2001-12-11
6295332 Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices Robert A. Selzer, William Rudolf Friml, Joe Baker Gagnon, Robert H. Macklin, Heinz Siegert +1 more 2001-09-25