Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6006391 | Workpiece cleaning element with improved rib configuration | Thomas Waddle | 1999-12-28 |
| 5975094 | Method and apparatus for enhanced cleaning of a workpiece with mechanical energy | — | 1999-11-02 |
| 5950327 | Methods and apparatus for cleaning and drying wafers | Glenn E. Peterson | 1999-09-14 |
| 5899216 | Apparatus for rinsing wafers in the context of a combined cleaning rinsing and drying system | Chad Goudie, John Natalicio, Greg Olsen | 1999-05-04 |
| 5870792 | Apparatus for cleaning wafers and discs | — | 1999-02-16 |