| RE34311 |
Semiconductor slice cassette transport unit |
Alton D. Lewis, Thomas C. Bimer |
1993-07-13 |
| 5217053 |
Vented vacuum semiconductor wafer cassette |
Leonard W. Foster |
1993-06-08 |
| 5137063 |
Vented vacuum semiconductor wafer cassette |
Leonard W. Foster |
1992-08-11 |
| 4857430 |
Process and system for determining photoresist development endpoint by effluent analysis |
Samuel J. Wood, Jr. |
1989-08-15 |
| 4857750 |
Sensor for determining photoresist developer strength |
Samuel J. Wood, Jr. |
1989-08-15 |
| 4851311 |
Process for determining photoresist develop time by optical transmission |
Samuel J. Wood, Jr. |
1989-07-25 |
| 4777804 |
Method and apparatus for easing surface particle removal by size increase |
Robert A. Bowling, Wayne G. Fisher |
1988-10-18 |
| 4636128 |
Semiconductor slice cassette transport unit |
Thomas C. Bimer, Alton D. Lewis |
1987-01-13 |
| 4609103 |
Semiconductor slice cassette carrier |
Thomas C. Bimer, Malvern L. Creps |
1986-09-02 |