Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7255115 | Apparatus for cleaning semiconductor wafers | Young Min Kwon, Chang-Hyeon Nam, Sang-Oh Park, Young-Kwang Myoung | 2007-08-14 |
| 7166183 | Apparatus and method for treating edge of substrate | Chang-Hyeon Nam, Seung-Kim Lee, Man-Young Lee, Yoon-kyung Kim, Han-Yong Chae | 2007-01-23 |